The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 1990
Filed:
Jun. 09, 1989
Allen R Waugh, East Grinstead, GB;
VG Instruments Group Limited, Crawley, GB;
Abstract
An ion gun for producing a pulsed microfocused beam of ions comprises an ion source arranged to produce a continuous ion beam along a z-axis toward a collector having an aperture on the axis. A deflector is arranged to maintain the beam substantially stationary and incident on the aperture for a pulse time, to deflect the beam away from the aperture to the collector and subsequently to return the beam to be incident at the aperture. A focussing lens focusses the beam from the deflection point to a final image point, and a condensing lens focusses the beam at the deflection point. A mass filter selects a single ion species, and a second deflector deflects the beam orthogonally to the deflector so that the returning path of the beam on the collector does not cross the aperture. A stigmator and a beam scanner are also provided.