The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 20, 1990

Filed:

May. 01, 1989
Applicant:
Inventors:

Akira Takei, Yokohama, JP;

Tetsuo Nishikawa, Kawasaki, JP;

Assignee:

Fujitsu Limited, Kawasaki, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; H01L / ;
U.S. Cl.
CPC ...
357 24 ; 357 30 ; 357 49 ;
Abstract

Field isolation between arrayed picture cells of an image sensor is fabricated thinner than the insulation layer for the peripheral portion of CCD operatively connected to picture cells. The field isolation is fabricated by a selective thermal oxidization, by which the isolation film inflates not only vertically but also laterally, therefore the thinner isolation layer can be narrower. And, the lower applied voltage to the picture cell than applied voltage to the CCD portion allows the narrower isolation. The narrower field isolation between the picture cells allows greater density of integration of the picture cells. Procedures to embody the invention are disclosed, one of which is to fabricate the thinner isolation first, and another one is the thicker insulation layer first.


Find Patent Forward Citations

Loading…