The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 13, 1990

Filed:

Aug. 19, 1988
Applicant:
Inventors:

Kunio Kobayashi, Itami, JP;

Sekio Itoh, Itami, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B07C / ;
U.S. Cl.
CPC ...
209576 ; 198774 ; 209905 ; 209939 ; 414225 ; 414416 ;
Abstract

An apparatus for inspecting the appearance of a semiconductor device has an imaging device which forms an image of the outside of a semiconductor device. An image analyzer analyzes the image and determines whether the semiconductor device is good or bad. A semiconductor device to be inspected is removed from a first conveyor on the periphery of a turntable by a vacuum chuck which is mounted on the turntable, and the semiconductor device is transported to in front of the imaging device by a turntable. If the semiconductor device is determined to be good, the turntable transports the semiconductor device to a second conveyor on the periphery of the turntable, and the vacuum chuck deposits the semiconductor device on the second conveyor. If the semiconductor device is determined to be bad, the turntable transports the semiconductor device to a discard receiving mechanism on the periphery of the turntable, and the vacuum chuck deposits the semiconductor device on the discard receiving mechanism.


Find Patent Forward Citations

Loading…