The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 1990
Filed:
Dec. 12, 1988
Applicant:
Inventors:
Dean W Freeman, Garland, TX (US);
James B Burris, Dallas, TX (US);
Cecil J Davis, Greenville, TX (US);
Lee M Loewenstein, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
B44C / ; C03C / ; B08B / ; D05D / ;
U.S. Cl.
CPC ...
156643 ; 156664 ; 156668 ; 427 38 ; 427299 ; 427399 ; 427 541 ;
Abstract
A processing apparatus and method utilizing a single process chamber to remove organics and metallic contaminates, remove native oxides, oxidize by heat and a oxidizing source, depositing a layer over the oxide formed with the capability of providing an source of additional ultraviolet light.