The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 1990
Filed:
Oct. 31, 1988
Applicant:
Inventors:
Robert F Miracky, Cedar Park, TX (US);
Kantesh Doss, Austin, TX (US);
Bryan Seppala, Renton, WA (US);
Assignee:
Microelectronics and Computer Technology Corporation, Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F / ; B44C / ; C03C / ; C03C / ;
U.S. Cl.
CPC ...
156643 ; 156656 ; 156666 ; 156345 ; 156902 ; 21912169 ; 21912185 ; 252 792 ; 252 794 ;
Abstract
A process for laser-assisted liquid phase etching of copper conductors which includes the use of a solution of sulfuric acid and hydrogen peroxide in contact with an integrated circuit substrate and the provision of a laser beam to select substrate areas having copper conductors to be etched. Also disclosed is an apparatus for the laser-assisted etching.
Miracky, Robert. (1990). Laser-assisted liquid-phase etching of copper conductors (U.S. Patent No. 4904340). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4904340
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile