The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 1990
Filed:
Nov. 25, 1987
Takashi Matsumoto, Ise, JP;
Shigeru Tanaka, Ise, JP;
Tsutomu Shinya, Ise, JP;
Yoshiyuki Iwasawa, Tokyo, JP;
Tsutomu Ishida, Tokyo, JP;
Hiroshi Harada, Tokyo, JP;
Shintaro Kobayashi, Tokyo, JP;
Kenji Okamoto, Tokyo, JP;
Shinko Electric Co., Ltd., Tokyo, JP;
Shimizu Construction Co., Ltd., Tokyo, JP;
Abstract
A railway carrier apparatus for semiconductor wafers which are contained in a wafer cassette is disclosed. This railway carrier apparatus includes: a carrier for carrying the wafer cassette; a guide rail, disposed along a line of travel of the carrier, for supporting the carrier to guide the carrier along the line of travel; and a drive mechanism for driving the carrier along the line of travel. The carrier includes; a carrier body slidably connected to the guide rail for movement along the guide rail; and a bedplate member, mounted on the carrier body, for supporting the wafer cassette on its upper face. The upper face of the bedplate member is inclined with respect to a horizontal plane in such a manner that one of its opposite side edges is positioned at a higher level than the other side edge.