The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 1990
Filed:
Apr. 21, 1988
Yutaka Misawa, Katsuta, JP;
Osamu Saito, Musashino, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A semiconductor LSI device formed in a semiconductor substrate comprising source/ drain regions of a MOSFET, polycrystalline silicon conductor to be connected to the source/drain region, and a silicide layer interposed between the source/drain region and the polycrystalline silicon conductor. Silicide intrudes into silicon bulk through an oxide film on the silicon substrate surface, assuring contact of low resistance, while lateral resistance of the source/drain region formed in the semiconductor substrate is also reduced. Reduction of contact/connection resistances is accomplished in a high density LSI which is thus imparted with an improved high-speed performance.