The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 1990
Filed:
Sep. 01, 1988
Applicant:
Inventors:
Norbert Schafer, Essingen, DE;
Eugen Weimer, Essingen, DE;
Herbert Gross, Essingen, DE;
Bernd Eppli, Konigsbronn, DE;
Eberhard Rossow, Oberkochen, DE;
Assignee:
Carl-Zeiss-Stiftung, Heidenheim/Brenz, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250397 ; 250310 ; 250306 ; 250216 ; 356225 ;
Abstract
A detector is disclosed which includes an elliptical hollow mirror and a tube having a reflecting inner surface for conducting the light emitted by a specimen under investigation in a scanning electron microscope. A vacuum window is seated at the outer end portion of the tube directly ahead of a receiver.