The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 1990
Filed:
Dec. 02, 1988
Applicant:
Inventors:
Paul M McLeod, Berkeley, CA (US);
Lewis M Fraas, El Sobrante, CA (US);
Robert E Weiss, San Francisco, CA (US);
Assignee:
DaidoSanso K. K., Osaka, JP;
Primary Examiner:
Int. Cl.
CPC ...
F27D / ;
U.S. Cl.
CPC ...
422199 ;
Abstract
A thermal cracking apparatus for cracking organic or inorganic gases is described. More particularly, the thermal cracker cracks inorganic gases such as arsine and phosphine for use in the growth of III-V compound semiconductor layers. The design of the apparatus minimizes the uptake of contaminants into the cracked gas stream.