The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 16, 1990

Filed:

Nov. 03, 1988
Applicant:
Inventors:

Peter G Borden, Palo Alto, CA (US);

Jon Munson, Sunnyvale, CA (US);

Assignee:

High Yield Technology, Inc., Mountain View, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01V / ;
U.S. Cl.
CPC ...
2502222 ; 356338 ;
Abstract

A real-time particle counter apparatus for monitoring contaminant particles in liquids includes a nebulizer, a drying chamber and a counter. The nebulizer provides an aerosol of droplets containing particles to the drying chamber, and the droplets are evaporated leaving solid particles to be counted and sized by the counter. Liquid is recirculated in a closed loop by pumping means that moves the liquid between the liquid source and the nebulizer. A constant air flow containing particles is provided to the counter and the apparatus is self-regulating so that no operator is required to maintain the level of liquid in the nebulizer.


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