The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 1990
Filed:
Sep. 09, 1988
Satoru Nishiwaki, Tokyo, JP;
Yukinobu Takahashi, Yokohama, JP;
Kouji Murakami, Yokohama, JP;
Norisuke Fukuda, Tokyo, JP;
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Abstract
A capacitance type sensitive element comprises a pair of electrode pairs formed on an insulating substrate and having opposite electrode faces perpendicular or slantingly formed with respect to a face of the insulating substrate; and a sensing material disposed between the opposite electrode faces of the electrodes and having electrical characteristics changed on the basis of the physical or chemical interaction between the sensing material and a substance to be detected. A method for manufacturing a capacitance type sensitive element comprises the steps of forming a groove on an insulating substrate; forming a metallic thin film having a predetermined thickness on the insulating substrate having the groove; performing the etching of a predetermined pattern in a portion including a bottom face portion of the groove in the metallic thin film, and forming a pair of electrodes; coating the entire surface of the pair of electrodes and the insulating substrate with a humidity sensitive material, and thereafter hardening the coated humidity sensitive material; and patterning the hardened humidity sensitive material. A method for manufacturing a capacitance type sensitive element may comprise the steps of forming a metallic thin film having a predetermined thickness on an insulating substrate; patterning the metallic thin film and forming a pair of electrodes at a predetermined distance; coating the entire surface of the insulating substrate including a pair of electrodes with a humidity sensitive material, and thereafter hardening the coated humidity sensitive material; and patterning the hardened humidity sensitive material.