The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 1990
Filed:
Dec. 02, 1987
Applicant:
Inventor:
Antonino Motta, Milan, IT;
Assignee:
SGS Microelettronica S.p.A., Catania, IT;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B44C / ; B05D / ; C23C / ;
U.S. Cl.
CPC ...
156643 ; 118715 ; 118 50 ; 156345 ; 204298 ;
Abstract
A decontamination system for processes for deposition, etching and/or growth of high purity films, particularly applicable to semiconductor technology. After introducing the products concerned with a process into a chamber and after creating a vacuum in the chamber, the chamber is decontaminated by a series of intermittent inflows of non-contaminating gas and subsequent pressure varying operations.