The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 1990
Filed:
Jan. 11, 1988
Peter Mahler, Hainburg, DE;
Leybold-Aktiengesellschaft, Hanau am Main, DE;
Abstract
In an apparatus for the treatment of substrates supplied in cassettes, with a series of lock chambers and treatment chambers, with a transport system for transporting at least one substrate holder through the chambers, and with a loading station, the problem of loading the apparatus with substrates from a moving belt without the need to hold the substrates in form-fitting mountings is solved as follows: (a) the substrate holders are constructed so as to hold one substrate at a time at an acute angle to a vertical plane, and (b) the loading station has a means for shifting at least one cassette and a manipulator system whereby the movements of extracting the substrate from the cassette and inserting it into the cassette can be performed in the perpendicular direction and whereby the substrate can be brought by a rotation of 90 degrees into a slanting position which corresponds substantially to the position of the receiving plane of the substrate.