The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 26, 1989

Filed:

Sep. 14, 1988
Applicant:
Inventors:

Kiyoshi Nagasawa, Ibaragi, JP;

Kozo Ono, Toride, JP;

Kojiro Ogata, Ishioka, JP;

Ken Murayama, Ibaragi, JP;

Yoshihiro Hoshino, Tsuchiura, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
33573 ; 33 / ; 318646 ;
Abstract

A fine positioning device is formed of a central rigid portion, a first set of outwardly-extending portions extending symmetrically along a first axis from the central rigid portion, a second set of outwardly-extending portions extending symmetrically from the central rigid portion along a second axis which is perpendicular to the first axis, a first set of parallel flexible-beam displacement mechanisms provided symmetrically to each other with the first set of outwardly-extending portions respectively to produce translational displacements along the second axis, and a second set of parallel flexible-beam displacement mechanisms provided symmetrically to each other with the second set of outwardly-extending portions respectively to produce translational displacements along the first axis. Three set of radial flexible-beam displacement mechanisms are provided to produce angular displacements about three axes.


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