The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 1989
Filed:
May. 23, 1986
Applicant:
Inventors:
Jun Kuwata, Osaka, JP;
Yosuke Fujita, Ashiya, JP;
Takao Tohda, Ikoma, JP;
Atsushi Abe, Ikoma, JP;
Tomizo Matsuoka, Osaka, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B / ; C23C / ;
U.S. Cl.
CPC ...
428432 ; 20419215 ; 20419222 ; 428433 ; 428698 ;
Abstract
A dielectric thin film element comprising a dielectric substrate and a dielectric thin film formed on the substrate. The thin film is made of a perovskite type oxide and formed by sputtering in an atmosphere containing nitrogen, by which the dielectric constant and the breakdown electric field strength are greatly improved. Thin film devices using the film and a method for making the thin film are also described.