The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 1989
Filed:
Feb. 08, 1988
Applicant:
Inventors:
Yusuke Yajima, Kokubunji, JP;
Kanji Tsujii, Tokyo, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R / ;
U.S. Cl.
CPC ...
324316 ;
Abstract
An electron spin resonance spectrometer is disclosed, in which a sample made of a semiconductor material or the like is illuminated with light while being applied with a magnetic field and a microwave, to detect the electron spin resonance due to a defect in a light-illuminated portion of the sample, on the basis of a photo-induced voltage appearing across the sample or a reduction in microwave intensity caused by the microwave absorption of the sample.