The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 1989
Filed:
Sep. 15, 1987
Applicant:
Inventors:
J Kirkwood Rough, San Jose, CA (US);
Peter W Rose, Menlo Park, CA (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05B / ;
U.S. Cl.
CPC ...
31511121 ; 31511181 ; 31511171 ; 31511191 ;
Abstract
A multiple electrode plasma reactor power circuit that utilizes a power splitting device, such as a center-tapped coil, to deliver balanced power to a plurality of powered electrodes. Balanced plasmas are thereby created between powered electrodes and grounded electrodes. In a preferred embodiment a plurality of center-tapped coils are connected to deliver balanced power to several powered electrodes located in a plurality of reactor chambers.