The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 1989
Filed:
Oct. 06, 1988
Applicant:
Inventors:
Riichiro Kasahara, Osaka, JP;
Tadashi Takada, Osaka, JP;
Assignee:
New Cosmos Electric Co. Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
73 23 ; 422 98 ;
Abstract
An ozone gas sensor comprising a film type semiconductor element including a substrate and a semiconductor film consisting of a metallic oxide formed on the substrate, and a layer of silica formed on a surface of the film type semiconductor element. At least one thin film layer of one or a plurality of types selected from metals and metal oxides is interposed between the semiconductor film and the layer of silica.