The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 05, 1989

Filed:

Aug. 25, 1987
Applicant:
Inventors:

Peter J Schubert, Greentown, IN (US);

Robert J Wallace, Southfield, MI (US);

Assignee:

General Motors Corporation, Detroit, MI (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
357 2311 ; 357 233 ; 357 234 ; 357 237 ; 357 238 ; 357 2312 ;
Abstract

A metal-oxide semiconductor field-effect transistor (MOSFET) device having an insulating barrier buried in the substrate between the device's source and drain regions. The insulating barrier can be in contact with the source region of the MOS device. The barrier is implanted in the substrate through a masked implantation of high doses of oxygen, followed by an annealing of the oxygen to form the silicon dioxide insulating barrier. The insulating barrier can be either discrete or part of a continuous sheet of silicon dioxide placed below the silicon substrate. Placing the insulating barrier between the source and drain regions substantially diminishes the punch-through effect of subsurface currents, thereby increasing the punch-through voltage. This permits the construction of MOS devices having shorter channel lengths with resulting higher circuit density and greater speed.


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