The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 28, 1989
Filed:
Jun. 01, 1988
Applicant:
Inventors:
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
250306 ; 250310 ;
Abstract
A scanning surface microscope is disclosed which includes a unit for moving a sample, and a micro-balance whose balance bar is provided with a probe-tip and an electrode at both ends thereof, to convert the irregularities of a sample surface facing the probe-tip into the displacement of the balance bar by utilizing a force generated between the probe-tip and the sample surface. The movement of the electrode indicative of the displacement of the balance bar is detected to obtain the topography of the sample surface.