The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 14, 1989

Filed:

Feb. 16, 1989
Applicant:
Inventors:

Douglas B Meakin, Liverpool, GB;

Piero Migliorato, London, GB;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 41 ; 437200 ; 437192 ; 357 237 ; 148D / ;
Abstract

In a process for manufacturing a thin film transistor, a first polysilicon layer is formed on a substrate and a silicon dioxide layer is formed on a region of the first polysilicon layer leaving exposed regions of that layer. A second polysilicon layer is formed on the silicon dioxide layer and aligned therewith. Regions of a selectively-grown electrically-conductive film are deposited on the second polysilicon layer and on the exposed regions of the first polysilicon layer, the film being such that it wil not grow on the edges of the silicon dioxide layer, but will grow on the exposed polysilicon to form gate, source and drain electrodes. The edges of the silicon dioxide layer therefore remain uncoated. The film may be formed of tungsten or may be formed, for example, by selective silicon epitaxy, phosphorus doped.


Find Patent Forward Citations

Quick Actions:

Meakin, Douglas. (1989). Method of fabricating a polysilicon thin film transistor (U.S. Patent No. 4880753). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4880753

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…