The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 14, 1989

Filed:

Mar. 27, 1989
Applicant:
Inventors:

Minoru Akagawa, Fremont, CA (US);

Satoshi Naoi, Fremont, CA (US);

Heijiro Fukumoto, San Francisco, CA (US);

Assignee:

Intelmatec Corporation, Fremont, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; B05C / ;
U.S. Cl.
CPC ...
204298 ; 20419212 ; 118500 ;
Abstract

A disk carrier is comprised of a carrier plate having one or more throughholes at which disks are carried with both surfaces exposed to be processed. Abutting and partially around each of these throughholes is a recess such that not only can a disk be easily positioned at the throughhole without having its surface scratched but also a corner is formed in this recessed region which can serve as an indexing depression. For this purpose, the recess may be fomed with a bottom surface parallel to the surface of the carrier plate and boundary wall in the form of a part of a polygon such that two mutually adjacent straight parts thereof, together with the bottom surface, form a corner which can serve as a reference position easily accessible by a touch sensor.


Find Patent Forward Citations

Loading…