The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 1989
Filed:
Aug. 26, 1986
Richard Ehrenfeldner, Leoben, AT;
Dieter Wagner, Linz, AT;
Voest-Alpine Aktiengesellschaft, Linz, AT;
Abstract
The circuit board plasma etching apparatus includes a preheating chamber, a plasma reaction chamber and a cooling chamber for etching circuit boards with plasma in a quasi continuous operation. The plasma reaction chamber is sealed by a gas-tight preheating sealing slide adjacent the preheating chamber and by a gas-tight cooling sealing slide adjacent the cooling chamber. A preheating door selectively closes the preheating entry end and a cooling door selectively closes the cooling chamber exit end. Boards to be etched are placed in printed circuit board cages supported by a guide rail within the chambers. The guide rail is separable into a preheating segment, a reaction chamber segment and a cooling segment contained within the respective chambers. A preheating chamber bellows allows axial movement of the preheating door, as does a cooling chamber bellows for the cooling chamber door. Axial displacement of the doors allows selective segmentation of the guide rail. A bypass conduit selectively allows gas exhausted from the cooling chamber to be fed to the preheating chamber.