The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 1989
Filed:
Jan. 27, 1988
Asahi Glass Company, Ltd., Tokyo, JP;
Abstract
A gas feeding nozzle feeds at least one kind of gas to form a thin film on a substrate by a normal pressure vapor deposition process. The nozzle is constituted by a plurality of plate-like bodies. A single or a plurality of slit-like gas discharging apertures are formed by stacking spacers each having at least one cut portion in the gas-discharging direction and partition plates for separating a stream of gas from another stream of gas adjacently flowing. A gas supplying plate with at least one gas supplying opening and at least one groove for flowing the gas in its width direction is attached on at least one of the outermost plate-like bodies. In order to form a single or a plurality of gas feeding paths between the gas supplying plate and the spacer for forming the gas discharging aperture, a single or a plurality of elongated holes, which are extended to the substantially entire width with respect to the width of the gas stream discharged, are formed in the partition plates and the spacers interposed between the gas supplying plate and the spacer.