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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 4877757 B1

PDFFull Text
Date of Patent:
Oct. 31, 1989

Filed:

Dec. 07, 1988

Method of sequential cleaning and passivating a gaas substrate using

Applicant:
Inventors:

Rudy L York, Plano, TX (US);

Joseph D Luttmer, Richardson, TX (US);

Patricia B Smith, Euless, TX (US);

Cecil J Davis, Greenville, TX (US);

Assignee:

Texas Instruments Incorporated, Dallas, TX (US);

Attorneys:

Barndt; B. Peter

Comfort; James T.

Sharp; Melvin

Primary Examiner:

Brian E Hearn

Assistant Examiner:

Beverly A Pawbkowski

Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437235 ; 437228 ; 437232 ; 437926 ; 437946 ; 156643 ; 427 35 ; 427 41 ; 427 541 ; 148D / ; 148D / ; 148D / ;
Abstract

A processing apparatus and method for depositing a passivating layer on a mercury-cadmium-telluride wafer utilizing a single process chamber to provide oxygen gas to the chamber with the excitation energy being provided by a remotely generated plasma in order to remove any organic residue and then supplying either a sulfide or selenide gas in combination with illuminating the wafer with an in situ generated ultraviolet energy to produce a passivating layer.

Find Patent Forward Citations

York, Rudy. (1989). Method of sequential cleaning and passivating a gaas substrate using (U.S. Patent No. 4877757). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4877757

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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