The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 1989
Filed:
Mar. 20, 1989
Applicant:
Inventors:
Yuji Chiba, Atsugi, JP;
Kenji Ando, Kawasaki, JP;
Masao Sugata, Yokohama, JP;
Hiroyuki Sugata, Atsugi, JP;
Toshiaki Kimura, Sagamihara, JP;
Kuniji Osabe, Tama, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
406 14 ; 118692 ; 21912112 ;
Abstract
An apparatus for controlling a flow of fine particles including a convergent-devergent nozzle in the flow path of the fine particles, and a controller for controlling the discharge of gas from a downstream chamber to maintain the pressures at the nozzle outlet and in the downstream chamber approximately equal to each other.