The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 1989
Filed:
Sep. 12, 1986
Applicant:
Inventors:
Gerald R Pruitt, Mendon, MA (US);
Peter Bertsch, Harvard, MA (US);
Assignee:
Helix Technology Corporation, Waltham, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F01B / ; F01B / ;
U.S. Cl.
CPC ...
92158 ; 92159 ; 92160 ; 9216 / ;
Abstract
The present invention relates to a cryopump having a gas bearing formed in a clearance seal between a piston and a cylinder. The gas bearing is formed by forcing pressurized gas from a gas plenum through orifices to the clearance seal.