The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 1989
Filed:
Jul. 22, 1988
Applicant:
Inventors:
Assignee:
NKK Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356381 ; 356382 ; 356369 ;
Abstract
Circularly polarized light caused to be incident on a film surface is converted into three light beams by optical flats to obtain electrical signals corresponding to the intensities of the respective light beams. Two ellipsometric parameters .psi. and .DELTA. are claculated from these three electrical signals.