The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 1989
Filed:
May. 20, 1988
Roderick G Rohrberg, Torrance, CA (US);
Timothy K Rohrberg, Torrance, CA (US);
Kevin D McGushion, Santa Monica, CA (US);
Other;
Abstract
Three embodiments of MicroCube Interconnection Hardware are disclosed: the MicroVac Vacuum Generator, the MicroControl Module, and the MicroSensor. Each embodiment is a combination of a MicroCube Precision Fitting and Various enhancements which provide precision control, regulation, or measurement of flows of gas or liquid in a semiconductor fabrication environment. The Microcube Precision Fitting is a substantially cubical unitary body that includes a central chamber and at least one external port. Each port comprises an annular counterbored step surrounded by a support wall which both enclose an aperture that extends into the central chamber. The MicroVac Vacuum Generator is a combination of a MicroCube Precision Fitting and three appendages: an inlet, a contaminant port, and an outlet. A first stage fits inside the inlet and is disposed coaxially to a second stage that resides within the outlet.