The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 1989
Filed:
Oct. 18, 1988
Kenichi Shibata, Hirakata, JP;
Toshiaki Yokoo, Hirakata, JP;
Kousuke Takeuchi, Hirakata, JP;
Toshiharu Tanaka, Higashiosaka, JP;
Maruo Kamino, Hirakata, JP;
Sanyo Electric Co., Ltd., Moriguchi, JP;
Abstract
A surface acoustic wave device having a single crystal aluminum nitride film wherein when the direction of propagation of the surface acoustic wave is expressed by (.lambda.,.mu.,.theta.) according to the Euler angle notation, .theta. is set to 90 degrees, .lambda. to a desired angle, and .theta. to an angle in the range of 30 to 150 degrees. In a surface acoustic wave device having a c-axis-oriented aluminum nitride film, the direction of c-axis orientation of the piezoelectric film is inclined within a plane containing the direction of propagation of the surface acoustic wave and perpendicular to the surface of the piezoelectric film at an angle in the range of about .+-.30 degrees to about .+-.150 degrees with respect to a normal to the piezoelectric film. The devices are 1.122% in maximum coupling coefficient.