The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 19, 1989

Filed:

May. 01, 1987
Applicant:
Inventor:

Roland A Levy, Berkeley Heights, NJ (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F / ; G21K / ;
U.S. Cl.
CPC ...
430311 ; 430966 ; 430967 ; 430-5 ; 428698 ; 428699 ; 428704 ; 378 35 ; 378 34 ; 427160 ; 4273722 ;
Abstract

A hydrogen-free boron-containing membrane in tension exhibits advantageous properties for use as a mask in X-ray lithography.


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