The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 1989
Filed:
Nov. 20, 1987
Yoshiyuki Iwasawa, Tokyo, JP;
Tsutomu Ishida, Tokyo, JP;
Hiroshi Harada, Tokyo, JP;
Kenji Okamoto, Tokyo, JP;
Shintaro Kobayashi, Tokyo, JP;
Takashi Matsumoto, Ise, JP;
Tsutomu Shinya, Ise, JP;
Shigeru Tanaka, Ise, JP;
Toshio Takasu, Ise, JP;
Kiwamu Yamamoto, Ise, JP;
Shimizu Construction Co., Ltd., Tokyo, JP;
Shinko Electric Co. Ltd., Mie, JP;
Abstract
There is disclosed a dusttight storage cabinet apparatus used for storing works such as wafer cassettes for containing semiconductor wafers. The storage cabinet apparatus includes: a housing having an entrance, formed in its front wall, for allowing works to come in and go out of the housing therethrough; an air supply duct for supplying the inside of the housing with clean air; a vertical rotation shaft rotatably disposed in the housing for turning about its longitudinal axis; a drive motor for turning the rotation shaft; and a rack assembly of a substantially cylindrical structure. The rack assembly is coaxially secured to the rotation shaft and has a plurality of compartments for storing the works therewithin. The compartments open radially outward and are partitioned off from one another so as to prevent cross contamination by dust among the compartments.