The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 1989
Filed:
Jul. 10, 1987
Applicant:
Inventors:
Assignee:
Fuji Photo Film Co., Ltd., Kanagawa, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ; B03C / ;
U.S. Cl.
CPC ...
118718 ; 118715 ; 55100 ; 209215 ; 2092231 ; 15DI / ;
Abstract
Contaminant magnetic dust particles and flakes generated during the thin film coating of a substrate 9 in a vacuum chamber 1 are gravitationally collected in catch pans or troughs 8 disposed below the deposition zones. Magnets 10 are provided under the bottoms of the pans to enhance the attraction and retention of the particles. The contaminants may alternatively or additionally be removed directly from an upper surface of the substrate web by sandwiching one or more of its horizontal conveyance runs between a pair of magnets 22, 23, with the pole face area of the lower magnet being larger than that of the upper one.