The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 29, 1989

Filed:

May. 18, 1988
Applicant:
Inventors:

Makoto Kudou, Kumagaya, JP;

Katsumi Ichikawa, Kumagaya, JP;

Assignee:

Kabushiki Kaisha Toshiba, Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F / ; B44C / ;
U.S. Cl.
CPC ...
156640 ; 156644 ; 156651 ; 156654 ; 1566611 ; 156345 ; 134 34 ; 430 23 ;
Abstract

A method of manufacturing a shadow mask, comprising the steps of forming a first resist pattern having a large number of openings on one major surface of a thin metal plate and a second resist pattern on the other major surface, the second resist pattern having a large number of openings with an opening size larger than that of the first resist pattern, etching the thin metal plate surface having the first resist pattern to form first recesses, removing the first resist pattern, forming an etching-resistive layer on the thin metal plate surface having the first recesses to fill the first recesses, etching the thin metal plate surface having the second resist pattern to form second recesses which have a size larger than that of the first recesses and communicate with the first recesses, treating and swelling the etching-resistive layer with an alkali solution, spraying warm water to the etching-resistive layer to remove the etching-resistive layer, and removing the second resist pattern.


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