The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 1989
Filed:
Jul. 20, 1987
Akihiko Ikegaya, Itami, JP;
Masaaki Tobioka, Kobe, JP;
Sumitomo Electric Industries, Ltd., Osaka, JP;
Abstract
A method and apparatus for synthesizing diamond film or coating by applying low-pressurized vapor phase capable of precipitating diamond on the surface of a substrate by activating gas composed of carbon including solid carbon, hydrocarbon, and carbon tetrachloride respectively being mixed with hydrogen. More particularly, the invention relates to an apparatus and method of synthesizing diamond by disposing a grid between a thermoelectron-radiating material heated with activated material gas to a minimum of 1,600.degree. C., and the substrate to be coated, where the thermoelectron radiating material and grid are respectively used for the negative and positive electrodes, followed by provision of potentials by causing the positive and negative electrodes to respectively be connected to the grid and the substrate by arranging another power supply source. The method of synthesizing diamond according to the invention securely generates extremely fine crystalline diamond particles each having a maximum of 2 .mu.m of diameter and provides extremely consummate diamond film having a minimum of 10.sup.10 .OMEGA..multidot.cm of electric resistance, which is substantially the guide for determining the residal amount of carbon such as amorphous carbon and graphite.