The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 1989
Filed:
Dec. 22, 1987
Yuzo Kato, Yokohama, JP;
Yasuo Kawai, Shizuoka, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A device for detecting the position of an object by use of an electron beam is disclosed. The device includes a beam supplying portion for supplying an electron beam, a scanning system operable to scan the object with the electron beam, a converting system operable to detect electrons from the object scanned with the electron beam and to convert the electrons into an electric signal, a detecting system operable to detect the position of the object on the basis of the signal from the converting system, and a control unit actable on the supplying portion to change, during the scan of the object, a condition for the irradiation of the object with the electron beam in accordance with the characteristic of the object.