The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 1989
Filed:
May. 29, 1987
Applicant:
Inventors:
Randal W Tustison, Lexington, MA (US);
Thomas Varitimos, Norwood, MA (US);
Assignee:
Raytheon Company, Lexington, MA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; B32B / ;
U.S. Cl.
CPC ...
428620 ; 428642 ;
Abstract
A single crystal Fe film is deposited on a (100) gallium arsenide substrate by ion beam sputtering the Fe film. The sputtered Fe atoms are imparted with energies in the range of about 1 electron volt to at least 10 electron volts to impart sufficient kinetic energy to said ions to allow said ions to have high surface diffusion rates, thereby permitting the atoms to be located at the proper lattice sites of the Fe crystal formed over the gallium arsenide substrate.