The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 1989
Filed:
Jan. 20, 1987
Applicant:
Inventors:
Yasuhiro Nozue, Yokohama, JP;
Koichi Kajiyama, Hiratuska, JP;
Kaoru Saito, Hiratsuka, JP;
Osamu Wakabayashi, Hiratsuka, JP;
Masahiko Kowaka, Hiratsuka, JP;
Yasuo Itakura, Hiratsuka, JP;
Assignee:
Kabushiki Kaisha Komatsu Seisakusho, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01S / ;
U.S. Cl.
CPC ...
372 98 ; 372 57 ; 372 99 ; 372103 ; 372108 ;
Abstract
A reduced projection light source comprises a laser device for emitting laser light having a transverse mode of multimodes, and an etalon located between a chamber of the laser device and a total reflection mirror. The light source is used as an exposure light source for transfer printing an ultrafine pattern on a semiconductor wafer.