The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 1989
Filed:
May. 24, 1988
Joachim Bunkenburg, Victor, NY (US);
Peter M Hammond, Rochester, NY (US);
Eastman Kodak Company, Rochester, NY (US);
Abstract
Apparatus for treating the surfaces of a plurality of wafers, such as semiconductor wafers, which comprises a container of treatment fluid having an open upper side for accepting a cassette containing a plurality of vertically disposed wafers. The cassette is supported in the fluid in said container and a transducer carrier is mounted in the lower portion of the container. The carrier has at least one megasonic transducer arranged to project a beam of ultrasonic energy upwardly over the vertical surfaces of the wafers. The transducer carrier is moved parallel with the wafer surfaces transversely of the container whereby the ultrasonic energy beam contacts and treats the entire surface of all of the wafers therein.