The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 1989
Filed:
Feb. 11, 1988
Manabu Matsumoto, Ibaraki, JP;
Takashi Ikeguchi, Hitachi, JP;
Shinjiroo Ueda, Abiko, JP;
Tadasi Sonobe, Iwaki, JP;
Toru Murashita, Atsugi, JP;
Satoshi Ido, Isehara, JP;
Kazuo Kuroishi, Hitachi, JP;
Yoshiaki Kazawa, Hitachi, JP;
Shunji Kakiuchi, Hitachi, JP;
Toshiaki Kobari, Ibaraki, JP;
Hitachi, Ltd., Tokyo, JP;
Nippon Telephone & Telegraph, Tokyo, JP;
Hitachi Service Engineering, Ltd., Tokyo, JP;
Abstract
An industrial compact synchrotron radiation source which can improve vacuum evacuation performance to prolong life-time of a charged particle beam and supply highly intensive stable synchrotron radiation. In the source, a charged particle beam bending duct forming a vacuum chamber through which the charged particle beam circulates is encompassed by a bending electromagnet, and at least one SR guide duct for guiding the radiation to outside extends from the outer circumferential wall of the bending duct. The SR guide duct is connected through a gate valve to an SR beam line duct for guiding the SR beam to an object to be worked and a vacuum pump is disposed on the side, close to an orbit of the charged particle beam, of the gate valve. The SR guide duct extending from the outer circumferential wall of the bending duct takes a form of a divergent duct which is widened in accordance with a spreading angle of the SR beam traveling through the SR guide duct.