The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 1989
Filed:
Feb. 04, 1988
Hans-Detlef Brust, Dudweiler, DE;
Siemens Aktiengesellschaft, Berlin and Munich, DE;
Abstract
A method and apparatus for detecting and imaging a voltage signal of at least one specific frequency at a measuring location of a test object, such as an integrated circuit, employ a scanning particle or radiation microscope for generating a voltage contrast signal whereby primary particles or radiation are pulsed or otherwise intensity-modulated with at least one specific frequency which frequency is different from at least one frequency of the signal at the test location. The voltage signal also includes an unmodulated topography component. The voltage contrast signal is mixed to a specific intermediate frequency and the resulting mixed signal is demodulated. The mixed signal is added to the unmodulated topography component and the result of the addition is displayed. The method and apparatus can be utilized to identify faulty electronic modules.