The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 25, 1989

Filed:

Mar. 21, 1988
Applicant:
Inventors:

Yoshihiro Yamato, Kanagawa, JP;

Tadashi Gomibuchi, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ; G01N / ;
U.S. Cl.
CPC ...
356237 ; 2502 / ;
Abstract

A vacuum degree inspecting device wherein a high degree of accuracy is not required for positioning of an object vessel and the degree of vacuum of an object vessel can be detected with a high S/N ratio under a reduced influence of fluctuations in size or configuration of a top (lid) wall of an object vessel. The device comprises a great diameter lens for refracting rays of light from a light source into rays of light to be irradiated upon an area including a lid wall of a sealed up vessel held at a predetermined inspection position, a beam splitter for passing part of rays from the great diameter lens therethrough and for reflecting reflected rays from the lid wall of the sealed up vessel, a condenser lens for condensing reflected rays from the beam splitter, an image sensor for detecting the thus condensed rays, and a comparator circuit for comparing an output voltage of the image sensor with a reference voltage to develop a signal representing that the sealed up vessel is acceptable or to be rejected.


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