The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 18, 1989

Filed:

Nov. 13, 1987
Applicant:
Inventors:

Hiroshi Daimon, Tokyo, JP;

Shozo Ino, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ; H01J / ;
U.S. Cl.
CPC ...
250305 ; 250309 ;
Abstract

A charged particle analyzer comprises a spherical grid, a spherical electrode, a screen plate, and a detector. The spherical electrode is outside of the spherical grid and is concentric with the spherical grid. The screen plate has an entry window and an exit opening, which are symmetrical with the center of the sphere of the spherical grid. A sample is disposed at the entry window of the screen plate. The detector is positioned behind the exit opening to detect charged particles emitted from the sample. The charged particles having the same energy can travel through the exit opening of the screen plate, and their amount or their angular distribution is measured.


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