The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 1989
Filed:
Dec. 09, 1987
Applicant:
Inventors:
Alan G Evans, Eastleigh, GB;
Mohammed M Farooqui, Southampton, GB;
Assignee:
Spectrol Reliance Limited, Swindon, GB;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
156644 ; 156657 ; 156662 ; 437228 ; 437233 ; 437927 ; 437968 ; 357 26 ; 296211 ;
Abstract
The invention provides a method of forming a sealed diaphragm (3) on a substrate (1) which comprises providing on the substrate (1) a sacrificial layer (2) , providing a diaphragm layer (3) over the sacrificial layer (2), providing at least one aperture (5) in the diaphragm layer (3) which is spaced from the periphery of the diaphragm layer (3), at least partially removing the sacrificial layer (2) from between the substrate (1) and the diaphragm layer (3) by way of the at least one aperture (5) and closing the at least one aperture (5).