The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 1989
Filed:
Dec. 09, 1987
Applicant:
Inventors:
Alan G Evans, Eastleigh, GB;
Mohammed M Farooqui, Southampton, GB;
Assignee:
Spectrol Reliance Limited, Swindon, GB;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; C23F / ;
U.S. Cl.
CPC ...
156643 ; 156653 ; 156657 ; 437228 ; 437233 ;
Abstract
A method of producing filaments of sub-micron cross-sectional dimensions including the steps of obtaining a substrate having a base and a delineating layer on the base and a step in a surface of the delineating layer, providing a layer of a material from which the filament is to be formed on the surface which replicates the step in the surface, anisotropically etching the layer of filament material in the direction of the surface so as to leave a filament of the material adjacent the step, and removing the delineating layer to wholly or partially separate the filament from the substrate.