The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 1989
Filed:
Dec. 09, 1987
Applicant:
Inventors:
Alan G Evans, Eastleigh, GB;
Mohammed M Farooqui, Southampton. both of, GB;
Assignee:
Spectrol Reliance Limited, Swindon, GB;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
156657 ; 156644 ; 156662 ; 437228 ; 437233 ; 437927 ; 437968 ; 357 26 ; 296211 ;
Abstract
The invention provides a method of producing on a substrate a diaphragm which is electrically isolated from the substrate. The method comprises obtaining a substrate (2) having a diaphragm(1) thereon which comprises a flexible central portion (1a) and a shouldered peripheral portion which supports the central portion (1a) above the substrate (2), applying a mask (6) over at least a part of the central portion (1a) and converting the unmasked portion (1b) of the diaphragm to a dielectric so as to electrically isolate the masked central portion (1a) of the diaphragm from the substrate (2).