The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 04, 1989

Filed:

Jan. 17, 1989
Applicant:
Inventors:

Steve J Bezuk, Inver Grove Heights, MN (US);

Tushar R Gheewala, Eagan, MN (US);

Stephen A Campbell, Woodbury, MN (US);

Robert J Baseman, Pleasantville, NY (US);

Assignee:

Unisys Corporation, Blue Bell, PA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
357 68 ; 357 69 ; 357 65 ; 357 75 ;
Abstract

Enhanced density of electrical and/or mechanical interconnections between adjacent wafers within integrated circuit assemblies and structural integrity of those interconnections under temperature cycling conditions, is attained by utilizing laser assisted chemical vapor deposition to fabricate precisely configured metal posts which serve as such interconnections.


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