The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 1989
Filed:
Dec. 11, 1987
Applicant:
Inventors:
Chester C Thompson, Roslyn Heights, NY (US);
Raymond J Loby, Plainview, NY (US);
Assignee:
Radiation Dynamics, Inc., Melville, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
2504923 ; 2503 / ; 250398 ; 250397 ;
Abstract
Provided herein is an electro-magnetic field former for controlling charged particle trajectories in a scanning charge particle source including a pair of induction coils and C-shaped ferromagnetic yokes which are positioned in the air space between the particle source and a target at the target edges to normalize the angle of incidence of the particles relatve to the target and to deflect scattered particles into the target edges. Also provided is a field former controller to compensate for induced flux variations caused by an oscillating particle beam.