Cooled flexible mirror arrangement

Abstract

A mirror arrangement includes a flexible faceplate having a reflective surface and a flexible backing plate which are so mounted on a support that the backing plate is situated behind the faceplate with a gap in between. An array of elongated actuators is arranged on the support rearwardly of and perpendicularly to the backing plate. Each actuator includes an actuating member which is movable in the longitudinal direction of the actuator and exerts a selected force on the backing member at least when the respective actuator is energized. This force is transmitted to the faceplate through respective actuator posts. The gap is sealed with respect to the exterior of the mirror arrangement to form an enclosed cooling chamber. A cooling fluid is supplied to the cooling chamber through supply pipes and discharged therefrom through discharge pipes that are fixed to the support and arranged between the actuators and that communicate with the cooling chamber through respective inlet and outlet openings that are provided in the backing plate and alternate with one another in respective rows. Regions of the backing plate that surround the actuator posts may be prestressed during the installation of the actuators to keep these regions in contact with the movable members of the actuators even during negative displacement.