The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 1989
Filed:
Jan. 27, 1988
Applicant:
Inventors:
Ken-ichi Kawasumi, Ome, JP;
Akio Inada, Tokyo, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01J / ;
U.S. Cl.
CPC ...
4221863 ; 42218605 ;
Abstract
A surface treatment apparatus for treating the surface of a substrate that is supported on a rotating table. The apparatus has a plate transmissive of ultraviolet rays that is mounted in parallel with the substrate. The plate has a plurality of supply nozzles for supplying a reactive gas to the rotating substrate surface, the nozzles being provided at positions of different radius of rotation in order to complete the surface treatment in a short period of time.
Kawasumi, Ken-ichi. (1989). Apparatus for treating surface of object with ultraviolet rays and (U.S. Patent No. 4842828). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4842828
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile